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General Scientific Meeting 2016 of the Belgian Physical Society
General Scientific Meeting 2016 of the Belgian Physical Society

18 May 2016
Pand
Europe/Brussels timezone
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Details for Jolien DENDOOVEN

UGent

Author in the following contribution

  • Thin, low roughness Ru films deposited by thermal and plasma enhanced atomic layer deposition using RuO4 and H2 at low temperatures
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