Ghent University
Author in the following contributions
- Thermal and Plasma Enhanced Atomic Layer Deposition on Powders and Particles
- Monte Carlo Simulations of Atomic Layer Deposition on 3D large surface area structures
- Plasma enhanced Atomic Layer Deposition of zinc sulfide
- Thin, low roughness Ru films deposited by thermal and plasma enhanced atomic layer deposition using RuO4 and H2 at low temperatures